Clean Logistics System & Test Equipment - SFA

Semiconductor

Based on its expertise from having supplied clean logistics in all the process of semiconductor production(wafer production, front-end, EDS, back-end) and the largest manufacturing infrastructure in the industry, SFA executes large-scale turnkey projects and has a global customer service system for customers in Korea, Taiwan, Singapore, China, and so on.
Besides, SFA is actively engaging in the application of its own smart factory solutions such as NEO AI & NEO Platform to various equipment, and development/commercialization of Predictive Maintenance(PdM) system.

Clean Logistics System & Test Equipment

SFA delivers various types of clean logistics & test equipment for front-end/back-end/test processes in manufacturing semiconductors. SFA is aggressively expanding the application of its own AI, Route, and Predictive Maintenance(PdM).

OHT

OHT is a high-efficiency transporting vehicle moving along the upper rails installed on the ceiling of semiconductor manufacturing lines. It loads and retrieves wafers across semiconductor production phases.

SFA has provided all the types of OHT to semiconductor manufacturing lines.
Simplified rail structure via the application of CPS power, etc.
Zero down time system
Real-time route optimization/vehicle assignment based on AI

N2 Stocker

It stores and transfers FOUB(wafer storage container) between production processes.

N2 Stocker can be installed in all the semiconductor production processes
Capability to make footprint at the minimum level
Smart storage through PdM(Predictive maintenance) & CBM(Condition Based Maintenance)

AGV

AGV system autonomously transfers products between different phases of semiconductor production.

AGV solutions suitable for all the processes of semiconductor manufacturing
AI-based AGV and vehicle equipped with 6-axis robot

Inter-layer High-Speed Lifter

It allows a vertical transportation of FOUP between floors.

Inter-layer(floor) transportation with high-speed and low-vibration
Implementation of fire-proof/smoke-proof floor(horizontal fire-proof doors)
World's first implementation of simultaneous and continuous transportation of 8ea FOUP

Clean Module Conveyor

Clean module conveyor is a conveyor system for delivering wafers, which is a key part of semiconductor manufacturing.

Real-time sorting and optimal route selection without congestion
Simultaneous and continuous transportation of multi-lots
High-speed delivery (speed ≥ 1m/sec, Turn Tact time ≤1sec)
High-speed unit replacement MTTR ≤ 2min

Application Test

Application Test is a system that automates the process of varying the voltage and temperature of the module to meet the product quality level desired by customers.

Implementation of the world's first integrated application test system[patented]
Systems allowing improved productivity and minimized worker errors
Improved operational efficiency by integrating chamber, pick & place, and storage

Business Inquiry

Contact Number

E-mail

+82-31-379-7336

park@sfa.co.kr